Ceramic arms are used for wafer transfer, handling, and positioning. Manufactured from high-purity alumina or silicon nitride, they undergo precision machining to achieve strict flatness and tight tolerances. They are compatible with various robotic wafer-handling systems and provide stable performance in wafer transportation, chip packaging, and high-precision inspection processes.
陶瓷手臂用于晶圆的传输、搬运与定位,我们采用高纯氧化铝或氮化硅材料,通过精密加工实现严格的平面度与公差控制,适配多类型晶圆传输机械手,为晶圆搬运、芯片封装、精密检测等工艺提供可靠支持。