As a core component in high-end semiconductor equipment, ceramic protection rings, focus rings, and isolation rings are widely used in lithography, etching, PVD, CVD, and other crucial wafer fabrication processes. Their exceptional plasma resistance, high-temperature stability, corrosion resistance, and electrical insulation ensure long-term reliability for critical chambers and moving assemblies.

作为高端半导体设备的核心适配部件，各类陶瓷保护环、焦点环与隔离环被广泛应用于半导体芯片制造的光刻、刻蚀、PVD/CVD等核心制程中，其超强耐等离子体侵蚀、耐高温、耐腐蚀及优异绝缘性为设备关键腔体及传动结构提供了长效稳定性。