Ceramic electrostatic chucks leverage the insulating, dielectric, and thermal properties of advanced ceramics to deliver strong and stable adsorption and uniform thermal conduction. They are available in multiple ceramic materials and engineered with high flatness, low leakage rates, and long service life, ideal for demanding vacuum and high-energy environments such as plasma etching, PVD, and CVD systems.

陶瓷静电吸盘利用陶瓷材料的绝缘性、耐热性与介电特性，为等离子体刻蚀、PVD、CVD 等设备提供强稳定的吸附力与均匀热传导。我们提供多种材料可选，并能实现高平面度、低泄漏率与长寿命表现，适用于苛刻的真空与高能环境。